Credits: 3 (3-0-0)
Prerequisites: for ME1: MCL131, MCL231 for ME2: MCL136
Description
An overview of micro and nano mechanical systems and their applications in Mechanical Engineering, MEMS Microfabrication methods, Silicon Micromachining methods, Laser, Electron and Ion beam micromachining methods, Mechanical Micromachining techniques, Nanomanufacturing methods, nanomaterials and nano metrology.