Credits: 3 (3-0-0)
Overlaps with: Some overlap with ESL744, ESL737, MLL341, PHL702
Description
Introduction to plasmas; Plasma sources; DC plasmas, Capacitively and inductively coupled Plasma Sources; Micro wave and ECR Plasma Source; Magnetron Sputtering, Plasma Enhanced Chemical Vapour Deposition (PECVD); Plasma etching, PIII, Plasma processes for thin films, Smart materials; Plasma process for Si based films, materials for lithium ion batteries (LIB), thermoelectric films, Hydrogen storage materials, 2-D materials, superconductive films.